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  • HOME > Products > Electron Beam Evaporator

    DE400CHL E-beam Evaporation System

    DE400CHL Electron Beam Evaporation System is assembled with one e-beam source of multiple crucible  for deposition metals, semiconductor, insulation materials on the up to 6 inch substrate, and it is assembled with worldwide well known components, the configuration / specification as per following description:


    • Features
    • Description

    Configuration

    Evaporation Chamber

    304 stainless steel chamber with viewport

    Vacuum Pumping

    Oxford cryo pump of 10" OD CF flange

    1500L/s pumping speed

    The base vacuum pressure of chamber:better than 7E-9Torr (clean, dry and empty condition)

    Vacuum Valve

    VAT High vacuum Gate valve, stainless steel, pneumatic actuation, 10”OD CF flange

    Chamber rough pumping valve, stainless steel, high vacuum, pneumatic actuation

    Stainless steel bellow/hose connection

    Swagelok Pneumatic actuation valve for chamber vent

    Evaporation Source

    HCR series rotary EIGHT (8) pocket E-BEAM source with 7cc crucibles

    Optional Load Lock chamber

    304 stainless steel chamber with viewport

    Sample Stage 

    Top mount and rotary or Side mount polar Substrate

    Film Control

    Crystal Film thickness Monitor and Control 

    Vacuum Gauging

    Wide range vacuum gauge and rough gauge

     

    Specification

    The Base Vacuum Pressure

    better than 7E-9Torr (clean, dry and empty condition)

    Sample Loading Capacity

    One Max. 8 inch flat substrate or multi small substrate

    Rate Resolution

    0.01 Angstroms/sec

    Thickness Resolution = 0.02 Angstroms

    0.1 Angstroms


    Related products

    • DE600C Electron Beam Evaporation system
    • DE500CH E-beam Evaporation System
    • DE400DHL E-beam Evaporation System
    • DE400BHL E-beam Evaporation System
    • DE400D E-beam Evaporation System
    • DE400 Electron Beam Evaporator
    1. Categories
    2. Magnetron Sputtering System
    3. Electron Beam Evaporator
    4. Thermal Evaporation System
    5. Pulse Laser Deposition System
    6. Combination System
    7. Targets & materials
    8. Components
    1. Applications
    2. Microelectronics (Metals, Metal Oxides, Dielectrics)
    3. Data Storage (Magnetic thin films)
    4. MEMS and Nano Technology
    5. Superconducting Materials
    6. Josephson Junctions
    7. Biomedical Thin Films
    8. Photovoltaics
    9. Optical Films and Photonics
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