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Magnetron Sputtering System
DE Technology manufactures sputtering systems to meet your specific deposition requirements. These systems can be configured with multiple RF and/or DC magnetron sources ranging in size from 1 inch (25 mm) to 8 inches (200 mm) in diameter. We can provide systems to handle wafers up to 300 mm in diameter, heating up to 1000°C and RF bias with additional ports for diagnostics.
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DE300D Magnetron Sputtering System
DE300D magnetron sputtering system is assembled with multi magnetron sputtering sources for deposition metals, semiconductor, insulation materials on the up to 6...
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DE300DL Magnetron Sputtering System
DE300DL magnetron sputtering system is assembled with multi magnetron sputtering sources for deposition metals, semiconductor, insulation materials on the up to...
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DE350 SiO2 Magnetron Sputtering System
Chamber with front open door Cryopump and dry pump One 6” sputter source RF power supply Side sputter Max. 6" substrate Substrate water c...
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DE500C Magnetron Sputtering System
DE500C magnetron sputtering system is assembled with multi magnetron sputtering sources for deposition metals, semiconductor, insulation materials on the up to...
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DE500CL Magnetron Sputtering System
DE500CL magnetron sputtering system is assembled with multi magnetron sputtering sources for deposition metals, semiconductor, insulation materials on the up to...
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DE500D Magnetron Sputtering System
DE500D magnetron sputtering system is assembled with multi magnetron sputtering sources for deposition metals, semiconductor, insulation materials on the up to 6...
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DE500DL Magnetron Sputtering System
DE500DL magnetron sputtering system is assembled with multi magnetron sputtering sources for deposition metals, semiconductor, insulation materials on the up to ...
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DE600C Magnetron Sputtering System
DE600C magnetron sputtering system is assembled with multi magnetron sputtering sources for deposition metals, semiconductor, insulation materials on the up to 6...
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DE600CL Magnetron Sputtering System
DE600CL magnetron sputtering system is assembled with multi magnetron sputtering sources for deposition metals, semiconductor, insulation materials on the up to...
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DE600D Magnetron Sputtering System
Chamber with front open door Cryopump and dry pump Up to six magnetron sputter cathode DC, RF or pulse DC power supply Sputter up or down Max. 8" substrate...
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DE600DL Magnetron Sputtering System
DE600DL magnetron sputtering system is assembled with multi magnetron sputtering sources for deposition metals, semiconductor, insulation materials on the up to ...
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